型号
Model |
应用特点
Application field |
装片工作台特点
Features of film loading bench |
基片尺寸
Size of substrate |
产量/每小时
1μ铝层厚度
Output per hour 1μm aluminum coating thickness |
厚度
均匀性
thickness homogeneity |
真空系统
Vacuum system |
| JC400-1/D |
适合科研、生产硅片及砷化镓片
Scientific research,production of silicon film and gallium arsenide film |
全自动盒对盒送片，溅射源数量可按工艺调整，低尘粒
Full automatic box-to-box film advance;quantity of sputtering source to be adiusted as per the process;low in density of dust particles |
4～6″ |
40 |
±5％ |
低温泵加
分子泵系统
Cryogenic pump system added with molecular pump |
| JC500-1/D |
适用于圆形片状工件
Circular sheet work-piece |
工件可进行公转，水平装片
Revolution of work-piece available；horizontal film loading |
4″ |
16 |
±8％ |
分子泵系统
Turbomolecular pump system |
| JC500-5/D |
适用于矩形片状工件
Rectangular sheet work-piecevv |
工件可进行公转，垂直装片
Revolution of work-piece available；vertical film loading |
150x150mm |
10 |
±8％ |
分子泵系统
Turbomolecular pump system |
| JC600-1/D |
适用于矩形片状工件
Rectangular sheet work-piecevv |
工件架为十边拄形，垂直装片
work-piece holder in decagonal column shape；vertical film loading |
280x100mm |
20 |
±8％ |
扩散泵系统
Diffusion pump system |
| JC600-2/D |
适合科研、生产砷化镓基片线宽亚微米级
Scientific research,production of gallium arsenide film with line width at submicron level |
工件可进行自传、公转
水平装片
Rotation and revolution of work-piece available；horizontal film loading |
3″ |
24 |
±5％ |
低温泵系统
Cryogenic pump system |
| JC650-1/D |
适用于矩形或圆形片状工件
Rectangular or circular sheet work-piece |
工件可进行公转，水平装片
revolution of work-piece available；horizontal film loading |
Φ100mm |
10 |
±5％ |
分子泵系统
Turbomolecular pump system |
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