真空室体
Vacuum chamber | Ø1300*1450mm，SUS304材质
φ1,300*1,450mm，SUS304 material |
排气系统
Air exhaust system | KT-500扩散泵2台，总排气速率（加载水冷阱）11,000Pa.L/S
Two sets of KT-500 diffusion pump, with a gross exhaust velocity (loaded with water-cooling trap) of 11,000Pa.L/S; |
极限真空≤2.0E-4Pa；排气时间≤15min(大气→4.0E-3Pa)
Ultimate vacuum ≤2.0E-4Pa; exhaust time ≤15min (atmosphere→4.0E-3Pa) |
基片架
Substrate holder | Ø1200四叶扇形基片架， 3～30rpm转速；可选配行星基片架、翻转机构等
φ1200 four-blade sector-shaped substrate holder, rotating speed 3～30rpm; a planet substrate holder or a turnover mechanism can also be matched; |
加热机构
Heating means | 最高350℃，PID控制；恒温20min后温度均匀性250±10℃
Maximum 350℃, PID control; temperature homogeneity being 250±10℃ after 20 min of constant temperature control; |
石英监控仪
Quartz monitor | 进口石英晶体膜厚监控仪；2点（或6点）晶振探头
Imported quartz crystal monitor on film depth, with two-point (or six-point) crystal probe; |
电子束蒸发源
Electron beam evaporation source | 10KW电子枪 2台，12点坩埚和环形坩埚
Two sets of 10KW electron gun, 12-point crucible or ring-shaped crucible; |
电阻蒸发源
Resistance evaporation source | 功率4KW（一对、两对或多对）
Power of 4KW (one pair, two pairs or more pairs) |
膜厚修正板
Film depth correction board | 2个自动可倒式膜厚修正机构
Two automatic film depth correction mechanisms of collapsible type |
反应气体
Reaction gas | APC自动压强控制仪，质量流量计
APC automatic pressure controller, mass flowmeter |
离子源
Ion source | 可选配Kafman、Holl或RF离子源
Available for matching of Kafman, Holl or RF ion source |
低温抽气装置
Low temperature evacuating equipment | 进口低温抽气装置有效捕集水蒸汽，最低温度－130℃
The imported low-temperature evacuating equipment can effectively gather water vapor; minimum temperature -130℃ |
RCS系统
RCS system | 基于WINDOWS的全自动镀膜软件
Windows-based full automatic coating software |
控制系统
Control system | 控制柜（液晶触摸式彩色显示器），远程控制遥控盒
Control cabinet (with liquid crystal color touch screen), remote-control box for remote control |
消耗能源
Energy consumption | 3相，220/380VAC,50Hz；～70KVA
Three-phase, 220/380VAC,50Hz；～70KVA |
水流量140L/min，压力0.3~0.5MPa
Water flow 140L/min, pressure 0.3~0.5MPa |
压缩空气0.5MPa~0.7MPa
Compressed air 0.5MPa~0.7MPa |
重 量
Weight | 净重约4500Kg
Net weight about 4,500 Kg |
安装空间
Installation space | W4000mmxD6000mmxH2700mm
W4,000mm×D6,000mm×H2,700mm |
